DRAM Memory Device with Manufacturable Capacitor

ABSTRACT

A high capacitance embedded capacitor and associated fabrication processes are disclosed for fabricating a capacitor stack in a multi-layer stack to include a first capacitor plate conductor formed with a cylinder-shaped storage node electrode formed in the multi-layer stack, a capacitor dielectric layer surrounding the cylinder-shaped storage node electrode, and a second capacitor plate conductor formed from a conductive layer in the multi-layer stack that is sandwiched between a bottom and top dielectric layer, where the cylinder-shaped storage node electrode is surrounded by and extends through the conductive layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit under 35 U.S.C. §119(e) of U.S.Provisional Application No. 61/936,004, filed Feb. 5, 2014, entitled “ADRAM Memory Device with Manufacturable Capacitor.” U.S. ProvisionalApplication No. 61/936,004 includes exemplary systems and methods and isincorporated by reference in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention is directed in general to integrated circuitdevices and methods for manufacturing same. In one aspect, the presentinvention relates to a capacitor formed in a semiconductor device.

2. Description of the Related Art

Integrated circuit devices, such as dynamic random access memory (DRAM)devices, increasingly require high performance capacitors withsufficient capacitance to extend the refresh period and increasetolerance to alpha particles. For example, a typical DRAM cellconfiguration includes a capacitor for storing a charge (i.e., the bitof information) and an access transistor that provides access to thecapacitor during read and write operations. To increase the storage nodecapacitance for high performance memory cells relative to bit linecapacitance, the overlap area between an upper electrode (plateelectrode) and a lower electrode (storage node electrode) should beincreased and/or the thickness of a dielectric film interposed betweenthe upper and lower electrodes should be reduced, for example by using ahigh-k dielectric material having a high dielectric constant k. Andwhile plate overlap can be increased by forming large, overlappinglateral capacitor plate layers, such structures reduce the patterndensity at the memory region, resulting in loading effects during photolithography, etch, and polishing steps. Another technique for increasingcapacitance is to fabricate the capacitor in the semiconductor substrateas a cylinder-shaped electrode plate that is concentrically positionedaround a lower or storage node electrode plate to create the increasedcapacitance from the surface area of the storage node electrode.However, the height of such cylindrical capacitors is effectivelylimited by the constraints from high aspect ratio contact etchlimitations which prevent contact etching from proceeding to asufficient depth. For example, aspect ratios as high as 50-60 are nowcommon in state-of-the-art DRAM devices. While the technicaldifficulties of fabricating high aspect ratio cell capacitors can beeased by using separate photolithographic steps to stack severalvertical layers on top of each other to eventually form one cellcapacitor, such multi-stack capacitor manufacturing presents newproblems with properly aligning electrodes in the different stack levelsto avoid electrical shorts or gaps, and can also damage the capacitordielectric layers which are sequentially deposited and etched in eachstack level. Another approach for increasing the storage capacitance,such as shown in U.S. Pat. No. 7,449,739, is to form embedded upper andlower capacitor stacks which each include a cylindrically shaped innerstorage node and an outer electrode that wraps around a thin capacitordielectric film formed on the inner storage node. However, thefabrication of capacitor stacks requires that, at each stack, the top ofthe outer electrode must be recessed below the top of the inner storagenode to prevent the outer electrode and inner storage node from beingelectrically shorted together. To achieve such recessed plate heights,one or more control liner layers may be formed over the top of the innerstorage node and then carefully etched to prevent the top of the outerelectrode from being exposed. As seen from the foregoing, there continueto be challenges associated with designing and fabricating highperformance capacitors.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention may be understood, and its numerous objects,features and advantages obtained, when the following detaileddescription is considered in conjunction with the following drawings, inwhich:

FIG. 1 illustrates a simplified cross-sectional view of a semiconductordevice having two capacitors manufactured in two stacks in accordancewith selected embodiments of the present disclosure;

FIGS. 2-10 illustrate partial cross-sectional views of a semiconductordevice during successive phases of a fabrication sequence in which oneor more embedded capacitors are formed with a process tolerant capacitorstack structure to provide a high capacitance metal-insulator-metalcapacitor in accordance with selected embodiments of the presentdisclosure; and

FIG. 11 illustrates a simplified cross-sectional view of a semiconductordevice having capacitors manufactured in multiple stacks in accordancewith selected embodiments of the present disclosure.

It will be appreciated that for simplicity and clarity of illustration,elements illustrated in the drawings have not necessarily been drawn toscale. For example, the dimensions of some of the elements areexaggerated relative to other elements for purposes of promoting andimproving clarity and understanding. Further, where consideredappropriate, reference numerals have been repeated among the drawings torepresent corresponding or analogous elements.

DETAILED DESCRIPTION

A high capacitance embedded metal interconnect capacitor and associatedfabrication processes are disclosed in which multi-stack capacitorstructures are formed with one or more lower capacitor stacks which eachinclude a first plate formed with a cylinder-shaped storage nodeelectrode and a second plate formed with a conductive plate layer suchthat the cylinder-shaped storage node electrode is surrounded by andextends through a conductive plate layer. By forming the second platewith a conductive plate layer instead of a thin outer electrode layerthat wraps around the cylinder-shaped storage node electrode, a robustand highly manufacturable capacitor structure is provided which protectsthe capacitor dielectric layer against etch-related damage, avoids theprocessing challenges associated with recessing the outer second platelayer relative to the inner storage node electrode, and/or reduces oreliminates electrical shorts between the first and second plates. Inselected embodiments, a lower capacitor stack is formed on a front endstructure with a multi-layer stack having a conductive plate layersandwiched between top and bottom dielectric layers. After patterning adeep trench opening in the multi-layer stack to expose a buried contactlayer from the front end structure, a high capacitancemetal-insulator-metal capacitor may be formed by sequentially forming ahigh-k dielectric layer and first storage electrode layer in the deeptrench opening, directionally etching the high-k dielectric layer andfirst storage electrode layer to form an opening which exposes theburied contact layer, and then filling the opening with a planarizedconductive material to form the inner storage node electrode. Formedfrom the remaining first storage electrode layer and planarizedconductive material, the inner storage node electrode is surrounded bythe high-k dielectric layer and conductive plate layer, and includes topand bottom surfaces which extend respectively, above and below theconductive plate layer. In selected embodiments, the high capacitanceMIM capacitor may include a plurality of intermediate capacitor stacksbetween a front end structure and top capacitor stack, where eachintermediate capacitor stack is formed in a multi-layer stack whichincludes a first plate segment formed with a cylinder-shaped storagenode electrode formed in a multi-layer stack through hole, and alsoincludes a second plate segment formed with a conductive plate layerfrom the multi-layer stack such that the cylinder-shaped storage nodeelectrode is surrounded by and extends through the conductive platelayer. In this way, the high capacitance MIM capacitor iscost-effectively fabricated as an embedded DRAM capacitor withoutrequiring formation of an etch stop layer or controlled etch processingto recess the top of the outer electrode below the inner storage node.

In this disclosure, an improved system, apparatus, and fabricationmethod are described for fabricating one or more embedded metalinterconnect capacitor structures in a wafer or substrate that addressvarious problems in the art where various limitations and disadvantagesof conventional solutions and technologies will become apparent to oneof skill in the art after reviewing the remainder of the presentapplication with reference to the drawings and detailed descriptionprovided herein. For example, there are challenges with increasing thecapacitance of integrated circuit capacitors imposed by etch depthlimitations from vertical etching high aspect ratio openings, alignmenttolerances associated with thin film conductive layers, and/or etchprocess complexities associated with recessing thin film conductivelayers. Various illustrative embodiments of the present invention willnow be described in detail with reference to the accompanying figures.While various details are set forth in the following description, itwill be appreciated that the present invention may be practiced withoutthese specific details, and that numerous implementation-specificdecisions may be made to the invention described herein to achieve thedevice designer's specific goals, such as compliance with processtechnology or design-related constraints, which will vary from oneimplementation to another. While such a development effort might becomplex and time-consuming, it would nevertheless be a routineundertaking for those of ordinary skill in the art having the benefit ofthis disclosure. For example, selected aspects are depicted withreference to simplified cross sectional drawings of a semiconductordevice without including every device feature or geometry in order toavoid limiting or obscuring the present invention. Such descriptions andrepresentations are used by those skilled in the art to describe andconvey the substance of their work to others skilled in the art. Inaddition, although specific example materials are described herein,those skilled in the art will recognize that other materials withsimilar properties can be substituted without loss of function. It isalso noted that, throughout this detailed description, certain materialswill be formed and removed to fabricate the semiconductor structure.Where the specific procedures for forming or removing such materials arenot detailed below, conventional techniques to one skilled in the artfor growing, depositing, removing or otherwise forming such layers atappropriate thicknesses shall be intended. Such details are well knownand not considered necessary to teach one skilled in the art how to makeor use the present invention.

Turning now to FIG. 1, there is shown a simplified cross-sectional viewof a semiconductor device 1 having two capacitors 150A, 150Bmanufactured over a substrate 100 in accordance with selectedembodiments of the present disclosure. As illustrated, each capacitor150A, 150B is formed over a front end structure 101 to include a lowerstack 102 and upper stack 103. Though example structures, well and layerregions in the semiconductor device 1 are illustrated in simplified formwith straight lines and curved or corner regions, it will be appreciatedthat the actual profile(s) for the different structures, well, and layerregions will not necessarily conform to simplified depictions, but willinstead depend on the specific fabrication process(es) used. Forexample, the various well or source/drain regions may have a curvedjunction profile reflecting the implantation and heating steps used inthe formation of same. In addition, the depicted device structures maybe formed with different semiconductor materials having P-typeconductivity and N-type conductivity. With the P-type materials, thedopant concentrations vary from lowest dopant concentrations (P−),higher dopant concentration (P), even higher dopant concentration (P+),and the highest dopant concentration (P++). Similarly, the dopantconcentrations for the N-type materials vary from lowest dopantconcentrations (N), higher dopant concentration (N+), and the highestdopant concentration (N++).

In the semiconductor device 1, the depicted substrate 100 may be formedas a bulk semiconductor substrate, semiconductor-on-insulator (SOI) typesubstrate or other semiconductor substrate material in which one or moreadditional semiconductor layers and/or well regions are formed usingepitaxial semiconductor growth and/or selective doping techniques asdescribed more fully hereinbelow. In an upper portion of the substrate100, one or more shallow trench isolation (STI) structures (not shown)may be formed that divide the substrate 100 into separate regions toprovide isolated active circuit regions. The upper portions of substrate100 may also include one or more active substrate wells or layers (notshown) between the STI regions that are formed by selectively implantingor diffusing appropriate polarity impurities into the substrate 100. Aswill be appreciated, the dopant type used to form the active wellregions will depend on whether the transistors formed in each area aren-type or p-type devices. If desired, one or more additional deep wellregions (not shown) may be formed to isolate the active well regions,such as by selectively implanting or diffusing appropriate polarityimpurities.

Without belaboring the details, one or more active circuits ortransistor devices are formed in the different regions of the substrate100 and encapsulated with one or more inter-layer dielectric (ILD)layers 114. For example, the active circuits or transistor devices maybe formed using any desired sequence of fabrication steps to define oneor more patterned gate electrodes with sidewall implant spacers and oneor more source/drain regions, and may include one or more definedelectrically conductive contact structures 116 for electricallyconnecting the source/drain regions and/or gate electrodes to power orsignal lines. For example, the active circuits may include one or moretransistor devices formed with a gate electrode stack 105, 106 andself-aligned source/drain regions 110-112 which are illustrated insimplified schematic form. In other embodiments, the transistor devicescan be made with any desired technology, such as MOSFET transistors,PINFET transistors, FINFET transistors, or the like, and may includedifferent designs, such as buried bit lines, high-k metal gateelectrodes, etc. Each transistor may be connected to correspondingembedded capacitors to form an embedded DRAM circuit, with a firstaccess transistor formed with gate electrode stack 105 and source/drainregions 110, 111, and with a second access transistor formed with gateelectrode stack 106 and source/drain regions 111, 112. To connect thetransistor devices to a power or signal conductor, one or more contactstructures 116, bit line conductors 118, and buried contacts (which maybe formed with one or more barrier metal liner layers 121 and firstmetal (M1) interconnect lines 122) are formed in one or more patternedinter-layer dielectric (ILD) layers 114, 120 using a dual damasceneprocess to electrically connect to the source/drain regions 110-112formed in the substrate 100. For example, the front end structure 101may include a bottom planarized ILD layer 114 formed with a suitabledielectric material (e.g., SiO2, SiOC, SiOF, doped or undopedtetra-ethyl ortho-silicate (BPTEOS), or other low-k dielectricmaterials) by patterning and etching a first planarized dielectric layer114 to form via openings over the source/drain regions 110, 112 whichare filled by depositing and polishing a metal layer (e.g., copper) toform the contact structures 116. In addition, an opening in the firstplanarized dielectric layer 114 may be formed to remove part of thecontact structure 116 over the shared source/drain region 111, filledwith a conductive layer 118, and then covered with additional dielectriclayer to form the common bit line conductor 118. Subsequently, acovering ILD layer 120 is formed on the bottom ILD layer 114 bypatterning and etching a second planarized dielectric layer 120 to formtrench openings over the contact structures 116 which are conformallycoated with one or more relatively thin barrier metal layers 121 (e.g.,Ta, TaN, Ta/TaN, Ta/TiN, WN) and then filled by depositing and polishinga metal layer 122 (e.g., copper, tungsten, or aluminum) with a chemicalmechanical polish (CMP) process to form the first metal (M1)interconnect lines. At this point, an etch stop layer (e.g., SiN, SiC,SiCN, SiON, SiCON, or the like) may be deposited on the entire surfaceof the semiconductor device 1 to serve as a base for forming the nextinterconnect level.

In the upper interconnect level(s), multiple capacitor stacks are formedto define one or more capacitor structures. For example, the depictedsemiconductor device 1 includes two DRAM cells, each including a cellcapacitor and a cell transistor which are connected in series between acommon conductive structure 146 (the “plate”) and a common bit line 118.The two cell transistors are formed by two gates 105, 106 which run asword lines, and one common bit line 118 which is connected to a first,common source/drain 111 of each of the two cell transistors through acentral contact via 116C. The two cells have two separate storage nodes.The storage node of each cell encompasses a source/drain region 110,112, a buried contact 116A/B, an optional buried contact pad 121-122,and a first plate electrode formed with a cylinder-shaped storage nodeelectrode 132A/B, 134A/B in the capacitor lower stack 102 and a lowerelectrode formed with thin conductive extension structures 142A/B in thecapacitor upper stack 103. As will be appreciated, the conductiveextension structures 142A/B may have any desired shape, such as anextension finger or cylindrical shell structures which form an extendedconductive surface for the lower electrode storage formed in thecapacitor upper stack. Each cell also includes a common second plateelectrode formed with a conductive plate layer 125 in the capacitorlower stack 102 and a common plate electrode 146 formed in the capacitorupper stack 103. In selected embodiments, the common plate electrode 146is formed with upper electrodes 146A/B formed inside the thin conductiveextension structures 142A/B and electrically connected together, whilein other embodiments, the common plate electrode 146 is formed with adeposited upper electrode layer 146 which is formed to surround the thinconductive extension structures 142A/B on both sides to increase thecapacitance for each cell.

Although not explicitly shown, it will be understood that the commonplate electrode 146 and conductive plate layer 125 may be directlyconnected to form a common electrical node, for example by forming aconnection using conductive contact via and plug structures outside ofthe cell array. It will also be understood that the depicted conductiveelements are embedded in one or more interlevel dielectric layers, suchas silicon oxide or the like. Also, the depicted vertical structures areshown in simplified form without showing multilayer structures or theexact vertical structure of the cell transistors. For example, it iswell known in the art that various techniques are applied to minimizethe off-state leakage currents of cell transistors, for example bygiving the transistors a three-dimensional structure with recessedchannels, thereby increasing the channel lengths without increasing thecell layout size.

To enable the fabrication of high aspect ratio cell capacitors withminimal processing complexity and risk of intra-plate shorts, the lowercapacitor stack 102 is formed with a three-layer structure having abottom dielectric layer 124, a middle conducting layer 125, and a topdielectric layer 126. In one or more through hole contact openingsformed to penetrate the three-layer structure 124-126, a conformalcapacitor dielectric film 130A/B is formed to cover part of the bottomand the sidewall surfaces of the through hole contact opening(s). On thedielectric film 130A/B, a cylinder-shaped storage node electrode isformed to extend through the lower capacitor stack 102. In selectedembodiments, the cylinder-shaped storage node electrode is formed byfirst forming a conformal conductive layer 132A/B to completely coverthe conformal capacitor dielectric film 130A/B and then removing theconformal conductive layer 132A/B from the bottom of the holes 133A/B toexpose the buried contact pads 121-122 at the bottom of the through holecontact opening(s). In addition, a second conductive layer 134A/B isformed to cover the sidewalls of the conformal conductive layer 132A/Bto fill the remainder of the holes 133A/B while remaining isolated fromthe middle conducting layer 125 by the remaining sidewall and bottomparts of the conformal capacitor dielectric film 130A/B, thereby forminga conductive path connecting the top and bottom of the through holecontact opening(s). As will be appreciated, the upper surface of thedielectric film 130A/B, first conformal conductive layer 132A/B, andsecond conductive layer 134A/B described may have a circular orelliptical shape when formed in a circular through hole contact opening.

To illustrate the formation of the upper capacitor stacks 102, 103 overthe front end structure 101, reference is now made to FIGS. 2-10 whichillustrate partial cross-sectional views of the semiconductor device 1shown in FIG. 1 during successive phases of a fabrication sequence inwhich one or more embedded capacitors are formed with a process tolerantcapacitor stack structure to provide a high capacitancemetal-insulator-metal capacitor in accordance with selected embodimentsof the present disclosure. Starting first with FIG. 2, there is shown apartial cross section view 2 of a multi-layer stack 124-126 formed overthe front end structure 101 described hereinabove. As depicted, themulti-layer stack is formed with a conductive layer 125 that issandwiched between isolating dielectric layers 124, 126. The bottomdielectric or insulating layer 124 may be formed by depositing acontinuous dielectric film, such as silicon dioxide or silicon nitride,on top of the front end structure 101, to a predetermined thicknessusing any desired deposition technique, such as chemical vapordeposition (CVD), plasma-enhanced chemical vapor deposition (PECVD),physical vapor deposition (PVD), atomic layer deposition (ALD),molecular beam deposition (MBD), or any combination of the above. On thebottom dielectric layer 124, a conductive layer 125 may be formed usingany desired deposition technique to form a conductive material (e.g.,doped polysilicon or silicide) to a target thickness, followed insequence by the deposition of a second dielectric or insulating layer126 on top of the conductive layer 125. The second dielectric orinsulating layer 126 may be formed by depositing or growing a continuousdielectric film, such as silicon dioxide or silicon nitride. The heightsor thicknesses of the dielectric or insulating layers 124, 126 may be,for example, a few hundred Angstroms, whereas the height or thickness ofthe conductive layer 125 may be for example 10,000 Angstroms.

Turning now to FIG. 3, there is shown a partial cross section view ofthe semiconductor device 3 after the multi-layer stack 124-126 ispatterned and etched to form through hole openings 127, 129 to exposeburied contacts 121-122 in the front end structure 101. As will beappreciated, the through hole openings 127, 129 may be formed using anydesired technique, such as selectively etching openings 127, 129 in themulti-layer stack 124-126 using a patterned mask or photoresist layer(not shown) and applying one or more anisotropic etch processes, such asan RIE etch, to define patterned openings 127, 129. Examples of suchselective etch processes include, but are not limited to, using a wet ordry etch chemistry, ablation, or any combination thereof In selectedembodiments, the etch process is controlled to be selective to all thematerials used to form the front end structure 101, such as, forexample, interconnect barrier materials (e.g., tantalum), etch stopmaterials (e.g., silicon nitride), and interlayer dielectric materials(e.g., silicon dioxide) so that such materials remain substantiallyintact. As a result of the etch process(es), the vertically stackedlayers include a conductive plate layer 125 surrounding the openings127, 129 which are isolated from above and below by the ILD layers 124,126. As will be appreciated, the through hole openings 127, 129 may beformed by etching cylindrical or elliptical holes through the entiremulti-layer stack 124-126 to expose the buried contact pads 121-122,though in other embodiments, the etch process(es) may leave a portion ofthe bottom dielectric layer 124 in place.

Turning now to FIG. 4, there is shown a partial cross section view ofthe semiconductor device 4 after a conformal capacitor dielectric layer130 and first conductive plate layer 132 are sequentially formed in thethrough hole opening(s) 127, 129. As an initial step, the conformalcapacitor dielectric layer 130 may be deposited as a conformalinsulating layer using any desired deposition technique, such as CVD,PECVD, PVD, ALD, MBD, or any combination(s) of the above to form a thincontinuous capacitor dielectric layer 130 covering over all of thestructures fabricated in previous steps. As formed, the conformalcapacitor dielectric layer 130 covers at least the bottom and sidewallsurfaces of the through hole opening(s) 127, 129. A suitable dielectricmaterial for the capacitor dielectric layer 130 is silicon oxide orsilicon nitride, or a high-k dielectric such as aluminum oxide, tantalumoxide, zirconium oxide, hafnium oxide, or other insulator materialhaving a dielectric constant value k of 7.0 or greater, including ahafnium-based dielectric such hafnium silicate (e.g.,Hf_(x)Si_(1-x)O_(y)) or hafnium oxy-nitride (e.g.,Hf_(x)Si_(1-x)O_(y)N_(z)), though other silicates of zirconium,aluminum, lanthanum, strontium, tantalum, titanium and combinationsthereof may also be used, including but not limited to HfSiO_(x),ZrSiO_(x), LaSiO_(x), YSiO_(x), ScSiO_(x), CeSiO_(x), and HfLaSiO_(x).On the capacitor dielectric layer 130, a first conductive plate layer132 may be formed by conformally depositing one or more suitableconductor materials (e.g., n-doped polysilicon, TiN, TaN) using CVD,PECVD, ALD, MBD, or any combination(s) thereof to a predeterminedthickness in the range of 5-200 Angstroms (e.g., 20-50 Angstroms),though other materials and thicknesses may be used. Though not shown,the first conductive plate layer 132 may also include one or morebarrier layers, such as sputtered or ALD barrier metal layers, such asTa, TaN, Ta/TaN, Ta/TiN, or WN. As illustrated, the conformal capacitordielectric layer 130 electrically separates the first conductive platelayer 132 from the conductive layer 125.

Turning now to FIG. 5, there is shown a partial cross section view ofthe semiconductor device 5 after a directional etch exposes the buriedcontact pads 121-122 while retaining the capacitor dielectric layer 130and first conductive plate layer 132 on the sidewalls of the etchopenings 133A/B. While any etch process may be used, in selectedembodiments, a directional or anisotropic etch, such as an RIE etch, maybe applied to selectively remove the capacitor dielectric layer 130 andfirst conductive plate layer 132 from the top surface of the topdielectric layer 126 and from the bottom of the etch openings 133A/B,thereby forming remnant sidewall conductive plate layers 132A/B whichare electrically isolated into separate nodes and confined within theindividual holes 133A/B. The directional etch process may besupplemented by a subsequent isotropic (e.g., wet) etch process toensure that any residues are removed. As a result of the directionaletch process(es), the buried contact pads 121-122 at the bottom of theholes 133A/B are exposed by the etch openings 133A/B, but the capacitordielectric layer portions 130A/B at the sidewalls are not exposed.Though drawn for simplicity as having uniform sidewall thickness, itwill be appreciated that remnant sidewall conductive plate layers 132A/Bmay not have a uniform thickness when the direction etch results in thetop region of the conductive plate layers 132A/B having thinner filmthickness than the bottom region.

Turning now to FIG. 6, there is shown a partial cross section view ofthe semiconductor device 6 after the etch openings are filled with oneor more conductive layers 134A/B. In selected embodiments, one or morelayers of conductive metal material may be deposited and planarized tofill the etch openings 133A/B, such as by forming one or more layers ofsuitable conductive material (e.g., polysilicon, Ti, TiN, W, copper)using CVD, PECVD, sputtering, PVD, electro-plating, electro-lessplating, or the like, followed by chemical mechanical polish (CMP)planarization to remove the copper and any remaining layers from the topdielectric layer 126. At this point, the capacitor lower stack 102 iscompleted, though a covering etch stop layer (not shown) may be formedon the entire surface of the semiconductor device 6.

On the capacitor lower stack 102, one or more upper stacks may be formedto complete the capacitors. To illustrate an example fabricationsequence, reference is now made to FIG. 7 which shows a partial crosssection view 7 of a patterned dielectric stack 136, 138 formed over thecapacitor lower stack 102 described hereinabove. While any desiredfabrication process may be used, in selected embodiments, the patterneddielectric stack 136, 138 may be formed by sequentially depositing firstand second dielectric layers 136, 138 using any desired depositiontechnique, such as CVD, PECVD, PVD, ALD, MBD, or any combination(s) ofthe above to a predetermined thickness. For example, the firstdielectric layer 136 may be deposited with a dielectric material (e.g.,silicon oxide) that is different from the underlying dielectric layer126, while the second dielectric layer 138 may be deposited as asacrificial layer using a dielectric material (e.g., silicon nitride)that is different from the underlying dielectric layer 136. In addition,the deposited first dielectric layer 136 is selected to have an etchrate that is slower than the etch rate of the underlying dielectriclayer 126, thereby providing an etch stop layer function. In the firstand second dielectric layers 136, 138, one or more via or trenchopenings 139A/B are formed, for example by using a patterned photoresistlayer or etch mask (not shown) to directionally or anisotropically etchportions of the first and second dielectric layers 136, 138 to form theetch openings 139A/B. Examples of such etch processes include, but arenot limited to, using a wet or dry etch chemistry, ablation, or anycombination thereof In selected embodiments, the etch process iscontrolled to be selective to all the materials used to form the lowercapacitor stack 102, such as, for example, the conductive layers 132A/B,134A/B, the etch stop materials (e.g., silicon nitride), the high-kcapacitor dielectric layer 130A/B, and the underlying dielectric 126(e.g., silicon dioxide) so that such materials remain substantiallyintact. Through proper patterning and placement, the etch openings139A/B are located where the upper capacitor stacks are to be formed.

Turning now to FIG. 8, there is shown a partial cross section view ofthe semiconductor device 8 after a bottom conductive electrode layer 142is formed on the bottom and sidewall surfaces of the etch openings139A/B. In selected embodiments, the bottom conductive electrode layer142 may be formed by conformally depositing one or more suitableconductor materials (e.g., n-doped polysilicon, TiN, TaN) using CVD,PECVD, ALD, MBD, or any combination(s) thereof to a predeterminedthickness in the range of 5-200 Angstroms (e.g., 20-50 Angstroms),though other materials and thicknesses may be used. Though not shown,the bottom conductive electrode layer 142 may also include one or morebarrier layers, such as sputtered or ALD barrier metal layers, such asTa, TaN, Ta/TaN, Ta/TiN, or WN. As illustrated, the bottom conductiveelectrode layer 142 covers the top and exposed sidewalls of thepatterned dielectric stack 136, 138 so as to be directly electricallyconnected to a cylinder-shaped storage node electrode 132A/B, 134A/B inthe capacitor lower stack 102 as part of the first plate electrode. Inaddition, the bottom conductive electrode layer 142 is electricallyisolated from the conductive layer 125 in the capacitor lower stack 101.

Turning now to FIG. 9, there is shown a partial cross section view ofthe semiconductor device 9 after a polish or other selective recess etchis applied to remove the bottom conductive electrode layer 142 from thetop of the patterned dielectric stack 136, 138. As a preliminary step,the etch openings 139A/B are filled with protective film 143A/B as asacrificial oxide mold layer, such as silicon oxide, in order to protectthe bottom conductive electrode layer 142 in the inside of openings139A/B. Subsequently, a chemical mechanical polish (CMP) planarizationand/or dry etch step may be applied to remove the bottom conductiveelectrode layer 142 from the top of the sacrificial dielectric layer138, leaving only the thin conductive extension structures 142A/B on thesidewalls of the etch openings 139A/B. As a result of the polish/etchprocess(es), the thin conductive extension structures 142A/B formed inthe etch openings 139A/B are separate, electrically isolated nodesconfined within the individual holes 139A/B.

Turning now to FIG. 10, there is shown a partial cross section view ofthe semiconductor device 10 after the sacrificial dielectric layer 138is removed and a conformal capacitor dielectric layer 144A/B is formedover the thin conductive extension structures 142A/B. For example, aselective etch or wet etch process, such as hydrofluoric acid (HF), maybe applied to remove the sacrificial dielectric layer 138 and protectivefilm 143A/B while leaving substantially intact the conductive extensionstructures 142A/B and underlying first dielectric layer 136. On the thinconductive extension structures 142A/B, a suitable dielectric layer142A/B may be selectively grown or deposited as a conformal layer, suchas by using thermal oxidation, CVD, PECVD, ALD, MBD, or anycombination(s) thereof to deposit a high-k dielectric layer 144A/B. Asuitable high-k dielectric material is an insulator material having adielectric constant value k of 7.0 or greater, including a hafnium-baseddielectric such hafnium silicate (e.g., Hf_(x)Si_(1-x)O_(y)) or hafniumoxy-nitride (e.g., Hf_(x)Si_(1-x)O_(y)N_(z)), though other silicates ofzirconium, aluminum, lanthanum, strontium, tantalum, titanium andcombinations thereof may also be used, including but not limited toHfSiO_(x), ZrSiO_(x), LaSiO_(x), YSiO_(x), ScSiO_(x), CeSiO_(x), andHfLaSiO_(x). As illustrated, the conformal capacitor dielectric layer142 is formed on both sides of the thin conductive extension structures142A/B. Subsequently, a common plate electrode 146 may be formed byplanarizing one or more layers of suitable conductor materials (e.g.,TiN, TaN) using CVD, PECVD, sputtering, PVD, electro-plating,electro-less plating, or the like. The resulting capacitor structurecompleted in the capacitor upper stack 103 is illustrated in FIG. 1. Asillustrated, the resulting capacitor structure includes a first plateelectrode storage node formed with a cylinder-shaped storage nodeelectrode 132A/B, 134A/B in the capacitor lower stack 102 and a lowerelectrode formed with thin conductive extension structures 142A/B in thecapacitor upper stack 103, and also includes a common second plateelectrode formed with the conductive plate layer 125 in the capacitorlower stack 102 and a common plate electrode 146 formed in the capacitorupper stack 103.

To provide high performance MIM capacitors with increased capacitance,the semiconductor devices, such as DRAM cells described herein, may beformed with a plurality of intermediate capacitor stacks between a frontend structure and top capacitor stack. For example, reference is nowmade to FIG. 11 which illustrates a simplified cross-sectional view of asemiconductor device 11 having capacitors manufactured in multiplestacks 201-204 in accordance with selected embodiments of the presentdisclosure. As illustrated, each DRAM capacitor may be formed with threeor more capacitor stacks 202-204 formed over the front end structure201, so there is no limit to any specific number of stacks. Using themethodology described hereinabove for forming the lower capacitor stack102, each of the intermediate capacitor stacks 202-203 may be formedbefore the upper capacitor stack 204 is formed.

Without belaboring the details, the front end structure 201 includes oneor more active circuits or transistor devices formed in substrate 200with gate electrode stacks 205, 206 and self-aligned source/drainregions 210-212 that are encapsulated with one or more inter-leveldielectric layers 214 in which one or more defined electricallyconductive contact structures 216 are formed for electrically connectingthe source/drain regions and/or gate electrodes to buried contactstructures 214 or shared bit line conductors 218. On the front endstructure 201, a first intermediate capacitor stack 202 is formed in amulti-layer stack 224-226 which includes a conductive plate layer 225sandwiched between top and bottom dielectric layers 224, 226. In themulti-layer stack 224-226, one or more through holes are etched. On thesidewalls of each through hole, a conformal capacitor dielectric layer230A/B is formed, followed by formation of a conformal conductive layer232A/B on the conformal capacitor dielectric layer 230A/B. Lastly, thethrough hole is filled with one or more conductive materials to form acylinder-shaped storage node electrode 234A/B which is surrounded by,but electrically isolated from, the conductive plate layer 225 so thatthe cylinder-shaped storage node electrode 234A/B extends above andbelow the conductive plate layer 225.

On the first intermediate capacitor stack 202, a second intermediatecapacitor stack 203 is formed in a multi-layer stack 235-237 whichincludes a conductive plate layer 236 sandwiched between top and bottomdielectric layers 235, 237. In the multi-layer stack 235-237, one ormore through holes are etched, and the sidewalls of each through holeare conformally coated with conformal capacitor dielectric layer 238A/B,followed by formation of a conformal conductive layer 239A/B. Lastly,the through hole in the multi-layer stack 235-237 is filled with one ormore conductive materials to form a cylinder-shaped storage nodeelectrode 240A/B which is surrounded by, but electrically isolated from,the conductive plate layer 236 so that the cylinder-shaped storage nodeelectrode 240A/B extends above and below the conductive plate layer 236.

On the second intermediate capacitor stack 203, an upper capacitor stack204 is formed using the methodology described hereinabove for formingthe upper capacitor stack 103. For example, the upper capacitor stack204 may include a patterned bottom dielectric layer 241, thin conductiveextension structures 242A/B which are formed on sidewalls of asacrificial dielectric layer (not shown) and electrically connected,respectively, to the cylinder-shaped storage node electrode 240A/B fromthe second intermediate capacitor stack 203. In addition, the uppercapacitor stack 204 includes a high-k dielectric layer 244A/B formed toconformally cover the thin conductive extension structures 242A/B, and acommon plate electrode 246 formed in the capacitor upper stack 204. Inselected embodiments, the common plate electrode 246 is formed withupper electrodes 246A/B formed inside the thin conductive extensionstructures 242A/B and electrically connected together, while in otherembodiments, the common plate electrode 246 is formed with a depositedupper electrode layer 246 which is formed to surround the thinconductive extension structures 242A/B on both sides to increase thecapacitance for each cell.

In the depicted semiconductor device 11, each high capacitance MIMcapacitor includes a pair of intermediate capacitor stacks 202, 203between a front end structure 201 and top capacitor stack 204. Eachintermediate capacitor stack (e.g., 202) is formed in a multi-layerstack 225-227 which includes a first plate segment formed with acylinder-shaped storage node electrode 232A/B, 234A/B that is formed tofill a through hole in the multi-layer stack 225-227, and which alsoincludes a second plate segment formed with a conductive plate layer 225from multi-layer stack 225-227 such that the cylinder-shaped storagenode electrode 232A/B, 234A/B is surrounded by and extends through theconductive plate layer 225 while also being electrically isolatedtherefrom by the capacitor dielectric layer 230A/B and protectivedielectric layers 224, 226. In this way, the high capacitance MIMcapacitor is cost-effectively fabricated as an embedded DRAM capacitorwithout requiring formation of an etch stop layer or controlled etchprocessing to recess the top of the outer electrode below the innerstorage node.

As will be appreciated, any number of additional backend or finishingprocesses can be used to complete the semiconductor device, such formingany necessary metal contacts, additional inter-layer dielectric layers,planarization, passivation, addition of subsequent layers or stacks,etc.

By using the capacitor stack formation process disclosed herein, anembedded capacitor may be formed that protects the capacitor dielectriclayer from etch damage or other processing defects since any dielectricetch processing does not affect the capacitor dielectric layer that ispositioned between the cylinder-shaped storage node electrode (e.g.,232A, 234A) and surrounding conductive plate layer (e.g., 225). This isensured by protecting the portions of the capacitor dielectric layers230A/B that face the conductive plate layer 225 with a protectiveconductor layer 232A/B during the etch process. The disclosed capacitorstack formation process also helps avoid electrical shorting between theupper and lower electrodes, thereby allowing process margins to beincreased. In particular, the placement of the conductive plate layer225 to be sandwiched between protective dielectric layers 224, 226prevents the conductive plate layer 225 from inadvertently contactingthe thin conductive extension structures 142A/B in the capacitor upperstack 103. As a result, persons skilled in the art will appreciate thatthe present disclosure prevents electrical shorting by a wide processmargin using readily controllable techniques, such as film depositionthickness, etch stopping at boundaries between different dielectricmaterials, etc.

By now it should be appreciated that there is provided herein anintegrated circuit device and associated fabrication process. Thedisclosed integrated circuit device includes a semiconductor substrate(e.g., SOI or bulk silicon) having one or more active circuits (e.g.,embedded DRAM circuit) and at least a first conductive contactstructure. The integrated circuit device also includes a multi-stackcapacitor structure formed over the semiconductor substrate. In themulti-stack capacitor, a first lower capacitor stack is formed in amulti-layer stack with a first capacitor plate conductor formed with acylinder-shaped storage node electrode formed in the multi-layer stack,a capacitor dielectric layer surrounding the cylinder-shaped storagenode electrode, and a second capacitor plate conductor formed from aconductive layer in the multi-layer stack that is sandwiched between abottom and top dielectric layer, where the cylinder-shaped storage nodeelectrode is surrounded by and extends through the conductive layer. Inselected embodiments, the first capacitor plate conductor formed withthe cylinder-shaped storage node is directly electrically connected tothe first conductive contact structure to form a storage node for anembedded dynamic random access memory cell. In other embodiments, thecylinder-shaped storage node electrode formed in the multi-layer stackmay include a first protective conductive layer formed on an interiorsidewall surface of the capacitor dielectric layer and a secondconductive layer formed to fill in between the first protectiveconductive layer. The multi-stack capacitor structure may also include atop capacitor stack formed on the first lower capacitor stack, where thetop capacitor stack includes a first capacitor plate conductor formedwith one or more thin conductive extension fingers and surrounded by aconformal capacitor dielectric layer, and a second capacitor plateconductor formed with one or more conductive layers that surround thefirst capacitor plate conductor and conformal capacitor dielectriclayer. In addition or in the alternative, the multi-stack capacitorstructure may include a second capacitor stack formed in a secondmulti-layer stack on the first lower capacitor stack. The secondcapacitor stack may include a third capacitor plate conductor formedwith a second cylinder-shaped storage node electrode formed in thesecond multi-layer stack and directly electrically connected to thefirst capacitor plate conductor; a second capacitor dielectric layersurrounding the second cylinder-shaped storage node electrode; and afourth capacitor plate conductor formed from a second conductive layerin the second multi-layer stack that is sandwiched between a bottom andtop dielectric layer and directly electrically connected to the secondcapacitor plate conductor, where the second cylinder-shaped storage nodeelectrode is surrounded by and extends through the second conductivelayer. The integrated circuit device may also include a contact padformed below the first lower capacitor stack that is in ohmic contactwith the cylinder-shaped storage node and that is isolated from theconductive layer by at least a portion of the capacitor dielectriclayer. In such multi-stack capacitor structures, the conductive layermay be sandwiched between a bottom dielectric layer and a top dielectriclayer formed as an etch stop layer to protect the conductive layer ofthe second capacitor plate conductor from being exposed during an etchprocess, and may include a second dielectric layer formed on the topdielectric layer with a different material than the top dielectriclayer, where the cylinder-shaped storage node electrode extends throughthe top dielectric layer to protrude above the conductive layer, butdoes not extend through the second dielectric layer.

In another form, there is provided a semiconductor device and associatedmethod of fabrication. In the disclosed methodology, one or more activecircuits are formed in a semiconductor substrate that are connected toat least a first conductive contact structure formed in a planarizeddielectric layer. In addition, a multi-layer stack is formed on theplanarized dielectric layer which includes a conductive layer that issandwiched between a bottom dielectric layer and a top dielectric etchstop layer to form a first capacitor plate conductor. In selectedembodiments, the multi-layer stack is formed by depositing a layer ofsilicon oxide as the bottom dielectric layer on the planarizeddielectric layer, depositing a doped polysilicon or silicide layer asthe conductive layer on the layer of silicon oxide, and depositing alayer of silicon nitride as the top dielectric etch stop layer on theconductive layer. A first opening is selectively etched in themulti-layer stack to expose the first conductive contact structure. Toselectively etch the first opening in the multi-layer stack, a patternedetch mask may be formed over the multi-layer stack to define an etchopening over the first conductive contact structure, and one or moreanisotropic etch processes are applied with the patterned etch mask inplace to selectively remove portions of the multi-layer stack under theetch opening, thereby forming the first opening in the multi-layer stackhaving substantially vertical sidewall surfaces. In the first opening, acapacitor dielectric layer is formed to conformally coat the bottom andsidewall surfaces of the first opening. In selected embodiments, thecapacitor dielectric layer may be formed by depositing as a conformallayer of silicon oxide, silicon nitride, or a high-k dielectric materialto form a thin continuous capacitor dielectric layer covering the bottomand sidewall surfaces of the first opening. In addition, acylinder-shaped second capacitor plate conductor is formed on thecapacitor dielectric layer to fill the first opening. To form thecylinder-shaped second capacitor plate conductor, a first conformalconductive plate layer may be deposited on the capacitor dielectriclayer formed on the bottom and sidewall surfaces of the first opening,followed by application of one or more anisotropic etch processes toremove portions of the first conformal conductive plate layer and thecapacitor dielectric layer from the bottom of the first opening and fromthe top dielectric etch stop layer, thereby exposing the firstconductive contact structure. Subsequently, a second conductive platelayer may be deposited to fill the first opening and form thecylinder-shaped second capacitor plate conductor in ohmic contact withthe first conductive contact structure, and one or more etch or polishsteps may be applied to planarize the second conductive plate layeruntil substantially coplanar with an upper surface of the top dielectricetch stop layer. As formed, the cylinder-shaped second capacitor plateconductor and capacitor dielectric layer are surrounded by and extendabove the conductive layer and extend through the top dielectric etchstop layer to form a lower capacitor stack. The disclosed methodologymay also form a top capacitor stack on the lower capacitor stack. Toform the top capacitor stack, a first dielectric layer is formed on themulti-layer stack with a different material than the top dielectric etchstop layer; a second dielectric layer is formed on the first dielectriclayer with a different material than the first dielectric layer; asecond opening is selectively etched in the first and second dielectriclayer to expose the cylinder-shaped second capacitor plate conductorusing the top dielectric etch stop layer as an etch stop layer toprotect the first capacitor plate conductor; a conductive plate layer isformed on the bottom and sidewall surfaces of the second opening; thesecond dielectric layer is removed to leave at least a portion of theconductive plate layer extending above the first dielectric layer; asecond capacitor dielectric layer is formed to conformally coat exposedsurfaces of the portion of the conductive plate layer extending abovethe first dielectric layer; and a plate electrode layer is formed on thesecond capacitor dielectric layer; where the portion of the conductiveplate layer and second capacitor dielectric layer are surrounded by theplate electrode layer to form the top capacitor stack. Prior to formingthe multi-layer stack, a contact pad may be formed in the planarizeddielectric layer with the contact pad positioned for ohmic contact withthe cylinder-shaped second capacitor plate conductor and to be isolatedfrom the first capacitor plate conductor by at least a portion of thecapacitor dielectric layer.

In yet another form, there is disclosed an integrated circuit DRAMcircuit and associated method fabrication. The integrated circuit DRAMincludes substrate in which is formed at least a portion of a dynamicrandom access memory (DRAM) bit cell circuit and a first conductivecontact structure that is electrically connected thereto. The integratedcircuit DRAM also includes a multilevel interconnect stack on thesubstrate which includes a top capacitor stack formed over a lowercapacitor stack. As formed, the lower capacitor stack includes a firstcapacitor plate conductor formed in a multi-layer stack with aconductive layer that is sandwiched between a bottom and top dielectriclayer, where an opening in the conductive layer defines a sidewallsurface of the conductive layer. The lower capacitor stack also includesa capacitor dielectric layer located adjacent to the sidewall surface ofthe conductive layer. In addition, the lower capacitor stack includes asecond capacitor plate conductor formed with a cylinder-shaped storagenode electrode that is located adjacent to the capacitor dielectriclayer so that the cylinder-shaped storage node electrode and capacitordielectric layer are surrounded by and extend above the conductive layerand extend through the top dielectric. In selected embodiments, theintegrated circuit DRAM circuit also includes a planar dielectric layerformed on the top dielectric layer with a different material than thetop dielectric layer, where the cylinder-shaped storage node electrodeextends through the top dielectric layer to protrude above theconductive layer, but does not extend through the planar dielectriclayer. In selected embodiments, the top capacitor stack includes asecond capacitor stack formed in a second multi-layer stack on the lowercapacitor stack. In such embodiments, the top capacitor stack includes athird capacitor plate conductor formed with a second cylinder-shapedstorage node electrode formed in the second multi-layer stack anddirectly electrically connected to the second capacitor plate conductor;a second capacitor dielectric layer surrounding the secondcylinder-shaped storage node electrode; and a fourth capacitor plateconductor formed from a second conductive layer in the secondmulti-layer stack that is sandwiched between a bottom and top dielectriclayer and directly electrically connected to the first capacitor plateconductor, where the second cylinder-shaped storage node electrode issurrounded by and extends through the second conductive layer. In otherembodiments, the top capacitor stack includes a second capacitor stackformed in a second multi-layer stack on the lower capacitor stack. Insuch embodiments, the top capacitor stack includes a first capacitorplate conductor formed with one or more thin conductive extensionstructures that are directly electrically connected to the secondcapacitor plate conductor and are surrounded by a conformal capacitordielectric layer, and a second capacitor plate conductor formed with oneor more conductive layers that are directly electrically connected tothe first capacitor plate conductor and that surround the firstcapacitor plate conductor and conformal capacitor dielectric layer.

Although the described exemplary embodiments disclosed herein aredirected to various embedded capacitor structures and methods for makingsame, the present invention is not necessarily limited to the exampleembodiments which illustrate inventive aspects of the present inventionthat are applicable to a wide variety of fabrication processes and/orstructures. Thus, the particular embodiments disclosed above areillustrative only and should not be taken as limitations upon thepresent invention, as the invention may be modified and practiced indifferent but equivalent manners apparent to those skilled in the arthaving the benefit of the teachings herein. For example, the lowercapacitor stack is shown as being formed from the second metal (M2)level, but such capacitor stacks can be made from the first metal (M1)level or any desired metal level. And while the active circuit areas areillustrated with simplified transistor devices in an embedded DRAMcircuit, this is merely for convenience of explanation and not intendedto be limiting and persons of skill in the art will understand that theprinciples taught herein apply to other devices and circuits. Moreover,the thicknesses, depths, and other dimensions of the described layersand openings may deviate from the disclosed ranges or values. Inaddition, the terms of relative position used in the description and theclaims, if any, are interchangeable under appropriate circumstances suchthat embodiments of the invention described herein are, for example,capable of operation in other orientations than those illustrated orotherwise described herein. The term “coupled,” as used herein, isdefined as directly or indirectly connected in an electrical ornon-electrical manner. Accordingly, the foregoing description is notintended to limit the invention to the particular form set forth, but onthe contrary, is intended to cover such alternatives, modifications andequivalents as may be included within the spirit and scope of theinvention as defined by the appended claims so that those skilled in theart should understand that they can make various changes, substitutionsand alterations without departing from the spirit and scope of theinvention in its broadest form.

Benefits, other advantages, and solutions to problems have beendescribed above with regard to specific embodiments. However, thebenefits, advantages, solutions to problems, and any element(s) that maycause any benefit, advantage, or solution to occur or become morepronounced are not to be construed as a critical, required, or essentialfeature or element of any or all the claims. As used herein, the terms“comprises,” “comprising,” or any other variation thereof, are intendedto cover a non-exclusive inclusion, such that a process, method,article, or apparatus that comprises a list of elements does not includeonly those elements but may include other elements not expressly listedor inherent to such process, method, article, or apparatus.

What is claimed is:
 1. An integrated circuit device comprising: asemiconductor substrate comprising one or more active circuits and atleast a first conductive contact structure; and a multi-stack capacitorstructure formed over the semiconductor substrate comprising a firstlower capacitor stack formed in a multi-layer stack, comprising: a firstcapacitor plate conductor formed with a cylinder-shaped storage nodeelectrode formed in the multi-layer stack; a capacitor dielectric layersurrounding the cylinder-shaped storage node electrode; and a secondcapacitor plate conductor formed from a conductive layer in themulti-layer stack that is sandwiched between a bottom and top dielectriclayer, where the cylinder-shaped storage node electrode is surrounded byand extends through the conductive layer.
 2. The integrated circuitdevice of claim 1, where the one or more active circuits comprises anembedded dynamic random access memory circuit.
 3. The integrated circuitdevice of claim 1, where the first capacitor plate conductor formed withthe cylinder-shaped storage node is directly electrically connected tothe first conductive contact structure to form a storage node for anembedded dynamic random access memory cell.
 4. The integrated circuitdevice of claim 1, where the multi-stack capacitor structure comprises atop capacitor stack formed on the first lower capacitor stack, the topcapacitor stack comprising: a first capacitor plate conductor formedwith one or more thin conductive extension fingers and surrounded by aconformal capacitor dielectric layer; and a second capacitor plateconductor formed with one or more conductive layers that surround thefirst capacitor plate conductor and conformal capacitor dielectriclayer.
 5. The integrated circuit device of claim 1, where themulti-stack capacitor structure comprises a second capacitor stackformed in a second multi-layer stack on the first lower capacitor stack,the second capacitor stack comprising: a third capacitor plate conductorformed with a second cylinder-shaped storage node electrode formed inthe second multi-layer stack and directly electrically connected to thefirst capacitor plate conductor; a second capacitor dielectric layersurrounding the second cylinder-shaped storage node electrode; and afourth capacitor plate conductor formed from a second conductive layerin the second multi-layer stack that is sandwiched between a bottom andtop dielectric layer and directly electrically connected to the secondcapacitor plate conductor, where the second cylinder-shaped storage nodeelectrode is surrounded by and extends through the second conductivelayer.
 6. The integrated circuit device of claim 1, where thecylinder-shaped storage node electrode formed in the multi-layer stackcomprises a first protective conductive layer formed on an interiorsidewall surface of the capacitor dielectric layer and a secondconductive layer formed to fill in between the first protectiveconductive layer.
 7. The integrated circuit device of claim 1, furthercomprising a contact pad formed below the first lower capacitor stackthat is in ohmic contact with the cylinder-shaped storage node and thatis isolated from the conductive layer by at least a portion of thecapacitor dielectric layer.
 8. The integrated circuit device of claim 1,where the conductive layer is sandwiched between a bottom dielectriclayer and a top dielectric layer formed as an etch stop layer to protectthe conductive layer of the second capacitor plate conductor from beingexposed during an etch process.
 9. The integrated circuit device ofclaim 8, further comprising: a second dielectric layer formed on the topdielectric layer with a different material than the top dielectriclayer, where the cylinder-shaped storage node electrode extends throughthe top dielectric layer to protrude above the conductive layer, butdoes not extend through the second dielectric layer.
 10. A method forforming a semiconductor device, comprising: forming one or more activecircuits in a semiconductor substrate connected to at least a firstconductive contact structure formed in a planarized dielectric layer;forming a multi-layer stack on the planarized dielectric layercomprising a conductive layer that is sandwiched between a bottomdielectric layer and a top dielectric etch stop layer to form a firstcapacitor plate conductor; selectively etching a first opening in themulti-layer stack to expose the first conductive contact structure;forming a capacitor dielectric layer to conformally coat bottom andsidewall surfaces of the first opening; and forming a cylinder-shapedsecond capacitor plate conductor on the capacitor dielectric layer tofill the first opening; where the cylinder-shaped second capacitor plateconductor and capacitor dielectric layer are surrounded by and extendabove the conductive layer and extend through the top dielectric etchstop layer to form a lower capacitor stack.
 11. The method of claim 10,where forming the multi-layer stack comprises: depositing a layer ofsilicon oxide as the bottom dielectric layer on the planarizeddielectric layer; depositing a doped polysilicon or silicide layer asthe conductive layer on the layer of silicon oxide; and depositing alayer of silicon nitride as the top dielectric etch stop layer on theconductive layer.
 12. The method of claim 10, where selectively etchingthe first opening in the multi-layer stack comprises: forming apatterned etch mask over the multi-layer stack to define an etch openingover the first conductive contact structure; and applying one or moreanisotropic etch processes with the patterned etch mask in place toselectively remove portions of the multi-layer stack under the etchopening, thereby forming the first opening in the multi-layer stackhaving substantially vertical sidewall surfaces.
 13. The method of claim10, where forming the capacitor dielectric layer comprises depositing asa conformal layer of silicon oxide, silicon nitride, or a high-kdielectric material to form a thin continuous capacitor dielectric layercovering the bottom and sidewall surfaces of the first opening.
 14. Themethod of claim 10, where forming the cylinder-shaped second capacitorplate conductor comprises: depositing a first conformal conductive platelayer on the capacitor dielectric layer formed on the bottom andsidewall surfaces of the first opening; applying one or more anisotropicetch processes to remove portions of the first conformal conductiveplate layer and the capacitor dielectric layer from the bottom of thefirst opening and from the top dielectric etch stop layer, therebyexposing the first conductive contact structure; depositing a secondconductive plate layer to fill the first opening and form thecylinder-shaped second capacitor plate conductor in ohmic contact withthe first conductive contact structure; and applying one or more etch orpolish steps to planarize the second conductive plate layer untilsubstantially coplanar with an upper surface of the top dielectric etchstop layer.
 15. The method of claim 10, further comprising forming a topcapacitor stack on the lower capacitor stack by: forming a firstdielectric layer on the multi-layer stack with a different material thanthe top dielectric etch stop layer; forming a second dielectric layer onthe first dielectric layer with a different material than the firstdielectric layer; selectively etching a second opening in the first andsecond dielectric layer to expose the cylinder-shaped second capacitorplate conductor using the top dielectric etch stop layer as an etch stoplayer to protect the first capacitor plate conductor; forming aconductive plate layer on the bottom and sidewall surfaces of the secondopening; removing the second dielectric layer to leave at least aportion of the conductive plate layer extending above the firstdielectric layer; forming a second capacitor dielectric layer toconformally coat exposed surfaces of the portion of the conductive platelayer extending above the first dielectric layer; and forming a plateelectrode layer on the second capacitor dielectric layer; where theportion of the conductive plate layer and second capacitor dielectriclayer are surrounded by the plate electrode layer to form the topcapacitor stack.
 16. The method of claim 10, further comprising forminga contact pad in the planarized dielectric layer prior to forming themulti-layer stack, where the contact pad is positioned for ohmic contactwith the cylinder-shaped second capacitor plate conductor and to beisolated from the first capacitor plate conductor by at least a portionof the capacitor dielectric layer.
 17. An integrated circuit DRAMcircuit, comprising: a substrate in which is formed at least a portionof a dynamic random access memory (DRAM) bit cell circuit and a firstconductive contact structure that is electrically connected thereto; anda multilevel interconnect stack on the substrate comprising a topcapacitor stack formed over a lower capacitor stack, the lower capacitorstack comprising: a first capacitor plate conductor formed in amulti-layer stack with a conductive layer that is sandwiched between abottom and top dielectric layer, where an opening in the conductivelayer defines a sidewall surface of the conductive layer, a capacitordielectric layer located adjacent to the sidewall surface of theconductive layer; and a second capacitor plate conductor formed with acylinder-shaped storage node electrode that is located adjacent to thecapacitor dielectric layer so that the cylinder-shaped storage nodeelectrode and capacitor dielectric layer are surrounded by and extendabove the conductive layer and extend through the top dielectric. 18.The integrated circuit DRAM circuit of claim 17, further comprising: aplanar dielectric layer formed on the top dielectric layer with adifferent material than the top dielectric layer, where thecylinder-shaped storage node electrode extends through the topdielectric layer to protrude above the conductive layer, but does notextend through the planar dielectric layer.
 19. The integrated circuitDRAM circuit of claim 17, where the top capacitor stack comprises asecond capacitor stack formed in a second multi-layer stack on the lowercapacitor stack, the top capacitor stack comprising: a third capacitorplate conductor formed with a second cylinder-shaped storage nodeelectrode formed in the second multi-layer stack and directlyelectrically connected to the second capacitor plate conductor; a secondcapacitor dielectric layer surrounding the second cylinder-shapedstorage node electrode; and a fourth capacitor plate conductor formedfrom a second conductive layer in the second multi-layer stack that issandwiched between a bottom and top dielectric layer and directlyelectrically connected to the first capacitor plate conductor, where thesecond cylinder-shaped storage node electrode is surrounded by andextends through the second conductive layer.
 20. The integrated circuitDRAM circuit of claim 17, where the top capacitor stack comprises asecond capacitor stack formed in a second multi-layer stack on the lowercapacitor stack, the top capacitor stack comprising: a first capacitorplate conductor formed with one or more thin conductive extensionstructures that are directly electrically connected to the secondcapacitor plate conductor and are surrounded by a conformal capacitordielectric layer; and a second capacitor plate conductor formed with oneor more conductive layers that are directly electrically connected tothe first capacitor plate conductor and that surround the firstcapacitor plate conductor and conformal capacitor dielectric layer.